A novel multi-degree-of-freedom thick-film ultrasonic motor.

This paper describes a new multi-degree-of-freedom (MDOF) ultrasonic motor that comprises few parts and is based on low-cost thick-film technology. Conventional ultrasonic motors using bulk lead zirconate titanate (PZT) or thin-film PZT layers are relatively expensive at the present time. Thick-film printed PZT technology provides the opportunity to reduce the costs of ultrasonic motors. To demonstrate the feasibility of this approach, an ultrasonic motor was fabricated from alumina using thick-film printed PZT actuators. The thick-film PZT and electrode layers were printed on a thin alumina plate, and a tiny cylinder was mounted at its center. This cylinder magnifies the lateral displacement of the stator, holds the spherical rotor, and transmits the driving force to the sphere. Three bending vibrations, B22, B30, B03, of the plate were applied to rotate the sphere. Sufficient displacements for rotating the sphere were obtained near the resonance of B22 by applying an excitation voltage of 200 V peak-to-peak via a three-phase drive circuit. Rotations in three orthogonal directions have been observed by controlling the phase of the driving signal to the PZT electrodes, and a MDOF ultrasonic motor was successfully realized.