A model accounting for spatial overlaps in 3D atom-probe microscopy.

The spatial resolution of three-dimensional atom probe is known to be mainly controlled by the aberrations of ion trajectories near the specimen surface. An analytical model accounting for the spatial overlaps that occur near phase interfaces is described. This model makes it possible to correct the apparent composition of small spherical precipitates in order to determine the true composition. The prediction of the overlap rate as a function of the particle size was found in remarkably good agreement with the simulations of ion trajectories that were made. The thickness of the mixed zone around beta precipitates was found to be of 0.3 nm for a normalised evaporation field of beta phase of 0.8. Using simulations, the overlap rate could be parameterised as a function of the apparent atomic density observed in particles. This model has been applied to copper precipitation in FeCu.