Literature DB >> 11469412

Three-dimensional STEM for observing nanostructures.

M Koguchi1, H Kakibayashi, R Tsuneta, M Yamaoka, T Niino, N Tanaka, K Kase, M Iwaki.   

Abstract

A new scanning transmission electron microscope has been developed for three-dimensional (3D) observations of nanostructures. Using double spherical fulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused ion beam. Copper via-holes of a semiconductor memory device and ZnO particles were observed by the 3D-STEM from different directions, and 3D-data of the ZnO particles were successfully reconstructed in a topography mode.

Entities:  

Year:  2001        PMID： 11469412     DOI： 10.1093/jmicro/50.3.235

Source DB:  PubMed          Journal:  J Electron Microsc (Tokyo)        ISSN： 0022-0744


  5 in total

1.  Electron tomography and holography in materials science.

Authors:  Paul A Midgley; Rafal E Dunin-Borkowski
Journal:  Nat Mater       Date:  2009-04       Impact factor: 43.841

2.  Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography.

Authors:  Sylvain Trépout; Philippe Bastin; Sergio Marco
Journal:  J Vis Exp       Date:  2017-03-12       Impact factor: 1.355

3.  Electron tomography imaging methods with diffraction contrast for materials research.

Authors:  Satoshi Hata; Hiromitsu Furukawa; Takashi Gondo; Daisuke Hirakami; Noritaka Horii; Ken-Ichi Ikeda; Katsumi Kawamoto; Kosuke Kimura; Syo Matsumura; Masatoshi Mitsuhara; Hiroya Miyazaki; Shinsuke Miyazaki; Mitsu Mitsuhiro Murayama; Hideharu Nakashima; Hikaru Saito; Masashi Sakamoto; Shigeto Yamasaki
Journal:  Microscopy (Oxf)       Date:  2020-05-21       Impact factor: 1.571

4.  Nanomaterial datasets to advance tomography in scanning transmission electron microscopy.

Authors:  Barnaby D A Levin; Elliot Padgett; Chien-Chun Chen; M C Scott; Rui Xu; Wolfgang Theis; Yi Jiang; Yongsoo Yang; Colin Ophus; Haitao Zhang; Don-Hyung Ha; Deli Wang; Yingchao Yu; Hector D Abruña; Richard D Robinson; Peter Ercius; Lena F Kourkoutis; Jianwei Miao; David A Muller; Robert Hovden
Journal:  Sci Data       Date:  2016-06-07       Impact factor: 6.444

5.  A cylindrical specimen holder for electron cryo-tomography.

Authors:  Colin M Palmer; Jan Löwe
Journal:  Ultramicroscopy       Date:  2013-11-13       Impact factor: 2.689
  5 in total

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