| Literature DB >> 11381685 |
R Farlow, W Galbraith, M Knowles, G Hayward.
Abstract
A 1-3 piezocomposite transducer with front face dimensions of 2 x 2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-micron pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 microns, and the transducer thickness is 170 microns, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.Entities:
Year: 2001 PMID： 11381685 DOI： 10.1109/58.920684
Source DB: PubMed Journal: IEEE Trans Ultrason Ferroelectr Freq Control ISSN： 0885-3010 Impact factor: 2.725