High-detective-quantum-efficiency fast-electron detector for electron energy loss spectroscopy

In order to increase the sensitivity of the parallel electron detector used in electron energy loss spectroscopy (EELS), we have developed a direct electron exposed detector, based on a photodiode array (PDA). This work investigates the performance of this detector at 100 keV incident electrons in terms of the detective quantum efficiency (DQE), the modulation transfer function (MTF) and radiation damage.