How to optimize the design of a quantitative HREM experiment so as to attain the highest precision.

Using parameter estimation theory, an expression is derived for the maximum precision with which the position of a single atom can be estimated from high resolution transmission electron microscopy images. This expression, being a complicated function of the object as well as of the microscope parameters and the electron dose, can be used to optimize the design of an HREM experiment so as to attain the highest precision.