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Literature DB >> 10060261

Pressure heating of electrons in capacitively coupled rf discharges.

Abstract

Entities: Chemical

Source DB: PubMed Journal: Phys Rev Lett ISSN： 0031-9007 Impact factor: 9.161

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Authors: Hyo-Chang Lee; Chin-Wook Chung
Journal: Sci Rep Date: 2015-10-20 Impact factor: 4.379

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