Literature DB >> 10046224

First-principles-derived dynamics of a surface reaction: Fluorine etching of Si(100).

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Abstract

Entities:  

Year:  1992        PMID： 10046224     DOI： 10.1103/PhysRevLett.69.200

Source DB:  PubMed          Journal:  Phys Rev Lett        ISSN： 0031-9007            Impact factor:   9.161


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  1 in total

1.  First-Principles Dynamics of Fluorine Adsorption on Clean and Monohydrogenated Si{001}.

Authors:  Ian Y H Wu; Stephen J Jenkins
Journal:  Langmuir       Date:  2022-06-01       Impact factor: 4.331
  1 in total

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