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Literature DB >> 10043079

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz.

Abstract

Source DB: PubMed Journal: Phys Rev Lett ISSN： 0031-9007 Impact factor: 9.161

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3 in total

Authors: V Garofano; R Bérard; S Boivin; C Joblin; K Makasheva; L Stafford
Journal: Plasma Sources Sci Technol Date: 2019-02-18 Impact factor: 3.584

Authors: Hyo-Chang Lee; Chin-Wook Chung
Journal: Sci Rep Date: 2015-10-20 Impact factor: 4.379

Authors: M B Hopkins
Journal: J Res Natl Inst Stand Technol Date: 1995 Jul-Aug

3 in total